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Thin Film Pressure Sensors

Thin film pressure sensors utilise a piezoresistive effect to measure pressure changes. They consist of a thin film sensing element, usually made of materials like polysilicon or metal alloys, deposited onto a flexible metal diaphragm. When external pressure is applied, it causes the diaphragm to deflect, inducing strain in the thin film. This strain alters the electrical resistance of the sensing element, which is then measured and converted into a corresponding pressure reading.

The key advantages of thin film technology lie in its miniature size, high sensitivity, and durability, making it suitable for various applications demanding precise pressure measurements in constrained spaces or harsh environments.

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How It’s Made

Thin-film sensing elements are typically manufactured through microfabrication techniques, such as sputtering or chemical vapour deposition. These processes deposit a thin layer of piezoresistive material, like polysilicon or metal alloys, onto a substrate, often a flexible diaphragm. The deposition process can be precisely controlled to achieve the desired thickness and uniformity of the sensing element.

How it works

The operating principle of a thin-film sensing element relies on the piezoresistive effect. Piezoresistive materials exhibit a change in electrical resistance when subjected to mechanical stress or strain. When external pressure is applied to the diaphragm, it deflects, causing the thin film to stretch or compress. This deformation induces strain within the thin film, which alters its electrical resistance proportionally to the applied pressure.

The resistance change is measured using a Wheatstone bridge circuit, which is usually almost entirely made up of thin-film piezoresistive elements. In some cases, additional electronics such as resistors may be incorporated to balance the bridge and compensate for offsets or temperature variations. The Wheatstone bridge configuration allows for high sensitivity and common-mode noise rejection, making it ideal for converting the small resistance changes of the thin film into a measurable voltage signal. This voltage signal can then be amplified and processed to obtain a precise pressure reading.

Characteristics & Properties

Thin film sensors offer a unique combination of miniature size, high sensitivity, wide pressure range, and excellent durability. These advantages make them a preferred choice for many applications where space constraints, accuracy, and reliability are critical factors.

Miniaturisation

Thin film sensors excel in miniaturisation due to the nature of their fabrication process. The deposition of thin layers onto substrates allows for incredibly small and compact sensor designs, which is not always feasible with bulkier technologies like bonded foil or thick film strain gauge.

High Stability

The strain gauges are created using sputtering techniques, which produces a molecular bond between the diaphragm substrate and the strain gauges, leading to a very stable sensing technology, with very little calibration shift over time.

High Vibration Shock Tolerance

Due to the small size and low mass of thin-film strain gauge sensing diaphragms, they perform very well in high shock and vibration environments with less degradation to the reading accuracy and signal to noise ratio.

Less Complex & More Robust Construction

Thin-film pressure sensors boast a simpler construction compared to other pressure sensor technologies due to their monolithic design. The sensing element, diaphragm, and often signal conditioning circuitry are integrated into a single assembly, reducing the number of components and potential failure points. This streamlined construction not only enhances the sensor’s robustness but also reduces its size and weight, making it more resilient to mechanical shocks and vibrations. Additionally, the materials used in thin-film technology are inherently durable and can withstand harsh environmental conditions, including high temperatures, pressures, and corrosive media. This combination of simplified construction and robust materials makes thin-film pressure sensors highly reliable and well-suited for demanding applications where durability and longevity are critical.

Dynamic High Pressure

Thin-film pressure sensors demonstrate exceptional dynamic high-pressure tolerance due to their robust construction and absence of vulnerable components. The metal diaphragm, typically made of stainless steel or other resilient alloys, can withstand rapid pressure fluctuations and high-pressure spikes without significant deformation or damage. This is a significant advantage over sensors that rely on oil filling or isolation membranes, which can be prone to rupture or leakage under extreme pressure conditions. Moreover, the absence of these components eliminates potential sources of contamination or interference, ensuring the sensor’s long-term stability and reliability in demanding dynamic high-pressure environments.

Specialised Gases

Thin-film pressure sensors are particularly well-suited for measuring specialised gases like hydrogen, oxygen, or helium due to their unique construction features. The utilisation of an all-welded, relatively thicker stainless steel diaphragm provides a robust barrier against gas permeation, preventing contamination of the measured gases and ensuring the integrity of the sensor over time. This is crucial when dealing with reactive gases like hydrogen or oxygen, which can degrade or react with other materials commonly used in sensor construction.

Furthermore, the absence of oil filling eliminates the risk of oil contamination, which can be detrimental to the purity of the measured gases. The all-welded construction also minimises the risk of leaks, preventing the escape of potentially hazardous gases like hydrogen into the electronics or surrounding environment. This enhances safety and ensures compliance with stringent regulations governing the handling of specialised gases.

Overall, the combination of a robust all-welded construction, thicker stainless steel diaphragm, and absence of oil filling makes thin-film pressure sensors an ideal choice for measuring specialised gases like hydrogen, oxygen, or helium. Their ability to prevent contamination, minimise leaks, and withstand harsh environments ensures accurate and reliable pressure measurements, even in demanding applications.

High Operating Temperature Range

Thin-film pressure sensors are capable of withstanding higher operating temperatures due to their robust all-metal construction and molecular bonding techniques. The absence of organic adhesives or epoxies, which are susceptible to degradation at elevated temperatures, contributes to the sensor’s thermal stability. Unlike other pressure sensor technologies that may incorporate temperature-sensitive materials like plastics or elastomers, thin-film sensors rely on materials like high-temperature resistant alloys, which exhibit excellent thermal stability and can maintain their mechanical and electrical properties even at high temperatures.

The molecular bonding process used in thin-film sensor fabrication ensures a strong and durable connection between the sensing element and the diaphragm, further enhancing its high-temperature resilience. This bonding method eliminates the risk of delamination or separation that can occur in sensors that rely on adhesives, which tend to weaken or fail at elevated temperatures.

Additionally, the thin-film sensing element itself is typically made of materials metal alloys that are inherently stable at high temperatures. These materials do not undergo significant changes in their properties or experience thermal degradation, ensuring consistent and reliable performance even in extreme thermal environments.

Applications

Motorsport

Miniature thin film pressure sensors are an ideal choice for high-performance motorsport vehicles due to their unique combination of features. Their low mass and small size are crucial for minimising added weight and optimising space in these highly engineered machines. This allows for streamlined integration into various vehicle systems without compromising performance or aerodynamics.

The ability to withstand high operating temperatures is another critical factor in motorsport, where engines and brakes generate intense heat. Thin film sensors, with their robust construction and absence of temperature-sensitive components, can reliably operate in these extreme environments, ensuring accurate pressure measurements even under intense racing conditions.

Furthermore, thin film sensors exhibit excellent resistance to shock and vibration, which are prevalent in the harsh environment of motorsport. The monolithic design and strong molecular bonding of these sensors minimise the risk of damage or malfunction due to mechanical stress, ensuring consistent and reliable performance even during high-speed manoeuvres and impacts.

In motorsport, precise pressure monitoring is essential for optimising engine performance, managing tire pressure, and ensuring the proper functioning of braking and hydraulic systems. Thin film pressure sensors provide the accuracy, reliability, and durability required to meet the demanding requirements of this high-performance industry. Their ability to deliver accurate pressure data in real-time allows engineers to make critical adjustments to vehicle setups, enhancing performance and safety on the track.

Hydraulics

High-range thin-film pressure sensors are ideally suited for hydraulic applications due to their unique ability to withstand extreme pressure conditions. In hydraulic systems, pressure surges and spikes are common occurrences, especially during rapid changes in flow or sudden valve closures. The robust construction of thin-film sensors, with their thicker metal diaphragms and absence of fragile components like oil-filled chambers or isolation membranes, allows them to endure these dynamic pressure fluctuations without sustaining damage or compromising accuracy.

Furthermore, the miniature size of thin-film pressure sensors is a significant advantage in compact mobile hydraulic packages, where space is at a premium. Their compact footprint allows for easy integration into tight spaces, minimising the overall size and weight of the hydraulic system. This is particularly beneficial in applications like construction equipment, agricultural machinery, and mobile cranes, where portability and manoeuvrability are crucial.

In addition to their high-pressure tolerance and small size, thin-film sensors also offer other benefits for hydraulic applications. Their high accuracy and fast response times enable precise monitoring and control of hydraulic pressures, ensuring optimal system performance and preventing damage due to over-pressure or under-pressure conditions. Their resistance to vibration and shock further enhances their reliability in demanding hydraulic environments, where mechanical stresses are common.

Moreover, thin-film pressure sensors can be customised for specific pressure ranges and output signals, providing flexibility to meet the unique requirements of different hydraulic applications. They can also be integrated with signal conditioning circuitry and digital interfaces, simplifying their integration into complex hydraulic control systems.

Overall, the combination of high-pressure tolerance, miniature size, accuracy, and reliability makes thin-film pressure sensors an excellent choice for a wide range of hydraulic applications, from heavy-duty industrial machinery to compact mobile equipment. Their ability to withstand dynamic pressure surges, provide precise measurements, and operate reliably in demanding environments ensures optimal performance and longevity of hydraulic systems.

Research & Development

Miniature thin film pressure sensors are invaluable tools in research and development, particularly for testing prototype machines and vehicles. Their small size and lightweight nature make them ideal for temporary installation without significantly impacting the overall weight or dimensions of the prototype, thus minimising any potential influence on test results. This allows engineers to obtain accurate and reliable pressure data from critical systems and components without compromising the integrity of the testing process.

The ability to seamlessly integrate these sensors into tight spaces or complex systems further enhances their usefulness in research and development. Thin film pressure sensors can be easily incorporated into various components, such as engines, hydraulic systems, or aerodynamic surfaces, to monitor pressure fluctuations in real-time during testing. This real-time data provides invaluable insights into the performance and functionality of the prototype, allowing engineers to identify potential issues, optimise designs, and validate engineering objectives.

Moreover, thin film sensors’ high accuracy and fast response times enable researchers to capture even subtle pressure variations, providing a comprehensive understanding of the system’s behaviour under different operating conditions. This level of detail is crucial for refining designs, troubleshooting problems, and ultimately achieving optimal performance in the final product.

Furthermore, the durability and reliability of thin film pressure sensors make them well-suited for the demanding conditions often encountered in research and development. They can withstand vibrations, shocks, and temperature fluctuations, ensuring consistent and accurate data collection throughout the testing process.

In summary, miniature thin film pressure sensors play a pivotal role in research and development by providing a non-intrusive, accurate, and reliable means of measuring pressure in prototype machines and vehicles. Their compact size, ease of integration, high accuracy, and durability make them indispensable tools for engineers and researchers seeking to optimise designs, validate performance, and achieve engineering objectives.

Advantages

  1. Miniaturisation of sensor package for applications requiring low mass and small size
  2. Good stability of output signal due to molecular bonded strain gauges
  3. Vibration and shock tolerance due to low mass and simpler robust construction
  4. Dynamic high pressure tolerant due to tough metal sensing diaphragm without oil filling or thin isolation membranes
  5. Welded design with thicker diaphragm prevents gas contamination and leaks, ideal for specialised gases.
  6. All-metal construction and molecular bonding allow for higher operating temperatures without degradation.

Disadvantages

  1. Less repeatable performance at low pressures and more susceptible to temperature changes.
  2. Lower output sensitivity than semiconductor strain gauge technologies
  3. Limited absolute pressure ranges due to design complexity of containing and maintaining a stable vacuum reference
  4. Less options for differential pressure ranges due to difficulties integrating an additional diaphragm into the reference side and isolation the strain gauges and interconnections from the process media

FAQ

Questions and Answers about about thin-film strain gauges on metal diaphragm pressure sensor technology.

Sensing Diaphragm Material & Performance

How well does the sensing diaphragm material perform for elasticity, hysteresis, repeatability and robustness?

Thin-film strain gauges on metal diaphragms generally exhibit good performance in terms of elasticity, hysteresis, repeatability, and robustness, offering an improvement on ceramic thick-film strain gauge and variable capacitance sensing technologies. The high strength of the metal diaphragm material ensures a wide elastic range, enabling accurate and repeatable measurements even under significant pressure variations.

However, when subjected to extreme pressures beyond the material’s yield point, permanent deformation can occur, leading to calibration shifts and potential degradation in other performance metrics. The thin-film strain gauges themselves are inherently robust and resistant to fatigue, contributing to long-term stability and repeatability.

Overall, this technology offers a favorable balance of performance characteristics, particularly for applications within the diaphragm’s elastic limits. However, careful consideration of the maximum operating pressure is crucial to prevent yield-induced performance degradation.

Media Compatibility

How protected is the pressure sensor module assembly against different types of aggressive media, and how customisable is the construction to enhance protection to a particular media type?

Thin-film strain gauges on metal sensing diaphragms offer robust protection against a wide range of aggressive media. The inherent strength and corrosion resistance of the metal diaphragm material contribute to its durability in various process environments. Additionally, the thicker sensing diaphragms used in this technology provide enhanced resilience compared to sensors that rely on thin oil-backfilled isolation diaphragms for protection. This eliminates the potential failure point associated with the isolation diaphragm and enhances overall robustness.

However, customization options for the diaphragm material are somewhat limited due to the specialized thin-film manufacturing process, which can be costly to adapt for different materials. This may necessitate careful selection of the sensor material to ensure compatibility with specific media types, particularly in highly corrosive or abrasive environments.

Oil Leakage

Is there a risk of oil leakage from this sensor, which could impact performance or safety?

The risk of oil leakage in thin-film strain gauge pressure sensors is completely eliminated due to their all-metal construction. The sensing module, typically fabricated from the same or a highly compatible metal as the process connector, can be directly welded to it, creating a hermetic seal. This eliminates the need for oil-filled isolation diaphragms, which are potential points of failure and leakage in other sensor technologies such silicon chip based pressure sensors. Consequently, thin-film strain gauge sensors offer exceptional reliability and safety, particularly in applications where oil contamination could impact performance or pose a hazard.

Pressure Containment

How well are the internal components joined together to provide a seal to withstand pressurisation that exceeds normal operating conditions, without degradation due to pressure and temperature cycling over the lifetime of the sensing device?

Fully welded construction techniques employed in these sensors create a high-integrity seal, exhibiting exceptional leak tightness even against extremely light gases such as helium and hydrogen. This hermetic sealing, coupled with the robust nature of welded joints, ensures unwavering performance even under demanding conditions involving substantial pressure and temperature cycling throughout the sensor’s operational lifespan. The absence of fragile or degradable sealing components, such as those found in thick-film and variable-capacitance ceramic diaphragm, plus some silicon chip based sensing technologies, further reinforces the long-term reliability and pressure integrity of these devices.

Small Size

How small a pressure sensor is it possible to make with this sensing technology?

The inherent advantage of thin-film strain gauges lies in their ability to be precisely deposited onto remarkably small surface areas through sputtering techniques. This miniaturization capability, coupled with the high sensitivity afforded by the piezoresistive effect, allows for the fabrication of pressure sensors with significantly reduced footprints compared to alternative technologies relying on bulkier sensing elements such as ceramic variable capacitance sensors. Consequently, thin-film strain gauge technology proves particularly advantageous in applications where spatial constraints necessitate compact sensor designs without compromising measurement performance.

Corrosion Resistance

How resistant are the media exposed materials to corrosive substances?

The stainless steels commonly used in the fabrication of thin-film strain gauge sensing elements exhibit adequate corrosion resistance to a wide range of fluids and gases encountered in industrial applications. This intrinsic material property, coupled with the relatively thicker metal sensing diaphragms compared to oil-filled silicon pressure sensors, significantly extends the operational lifespan of these sensors in corrosive environments. The increased thickness of the diaphragm acts as a robust barrier against corrosive attack, requiring substantially longer exposure times to reach a level of degradation that would compromise performance or lead to failure. However, it is essential to note that the specific corrosion resistance will depend on the exact alloy composition and the nature of the corrosive media.

Abrasion Resistance

How resistant are the media exposed materials to abrasive substances?

The thicker metal diaphragms employed in thin-film strain gauge sensors offer improved resistance to abrasion compared to the thinner isolation diaphragms used in oil-filled silicon chip pressure sensors. This increased thickness translates to a significantly longer erosion time before performance degradation or failure occurs. However, it’s important to acknowledge that the relative softness of the metal diaphragm makes it more susceptible to erosion compared to the inherently harder materials used in variable-capacitance or thick-film ceramic diaphragm sensing elements. Therefore, in applications involving highly abrasive media, careful consideration of the diaphragm material and potential erosion rates is crucial to ensure long-term sensor reliability.

High Pressure Spikes

What are the chances of a noticeable effect on the sensors operational performance, or damage to the sensors internal components, from exposure to very dynamic or quickly changing pressures, such as hydraulic pressure spikes or water hammer?

The inherent robustness of all-welded metal sensing diaphragm assemblies, devoid of oil fills or delicate isolation diaphragms, endows thin-film strain gauge pressure sensors with remarkable resilience against dynamic pressure fluctuations and spikes. However, exposure to severe pressure transients, such as those encountered in hydraulic systems or water hammer events, may induce subtle yet perceptible shifts in sensor performance, particularly affecting the zero offset. These shifts, although typically minor, can necessitate recalibration to maintain optimal accuracy in critical applications. Nonetheless, the overall structural integrity of the sensor remains largely unaffected, underscoring its suitability for demanding environments characterized by rapid pressure changes.

Overpressure Handling

How affected is the accuracy performance of the sensor by an overpressure condition, where the pressure exceeds 100% of range?

While thin-film strain gauges on metal sensing diaphragms boast good accuracy within their specified operating range, their performance degrades significantly under overpressure conditions which reduces the amount of overrange that can be applied. Unlike silicon chip diaphragms which are 100% elastic to breaking point, the inherent ductility of metal diaphragms, though advantageous in many respects, leads to a tendency to yield rather than fracture when subjected to excessive stress. This yielding results in permanent deformation, causing a shift in the sensor’s calibration and compromising its accuracy.

Moreover, repeated overpressure events can further exacerbate the issue, accumulating plastic deformation and leading to progressive degradation of the sensor’s linearity and hysteresis characteristics. This underscores the importance of employing appropriate overpressure protection mechanisms or selecting a sensor with a sufficiently high overpressure rating to ensure reliable and accurate measurements throughout its operational lifespan.

Very Low Pressure Ranges (<100 mbar)

How well does it perform measuring very low pressures with a pressure range lower than 100 mbar?

The performance of thin-film strain gauges on metal sensing diaphragms degrades notably when measuring very low pressures (below 100 mbar). The larger, thinner diaphragms required for increased sensitivity at these low ranges exhibit reduced stiffness, leading to diminished elasticity. This, in turn, amplifies the effects of hysteresis, where the sensor output differs depending on whether pressure is increasing or decreasing. Additionally, thermal effects become more pronounced at low pressures, impacting the sensor’s accuracy and stability. While careful design and compensation techniques can mitigate these challenges to some extent, the inherent limitations of the technology pose inherent challenges for precise and reliable measurements in the very low-pressure regime.

Low Pressure Ranges (100-1000 mbar)

How well does it perform measuring low pressures with a pressure range between 100 and 1000 mbar?

While thin-film strain gauges on metal sensing diaphragms perform admirably at higher pressures, their effectiveness diminishes in the low-pressure range (100-1000 mbar). The necessity for larger, thinner diaphragms to enhance sensitivity in this regime compromises their stiffness, leading to reduced elasticity and increased susceptibility to hysteresis effects. Additionally, thermal gradients and fluctuations can induce significant measurement errors at these lower pressures, further impacting accuracy and stability. While careful design considerations and compensation techniques can partially mitigate these limitations, the inherent trade-offs between sensitivity and stability become more pronounced at low pressures, requiring careful evaluation for specific applications.

Medium Pressure Ranges (1-100 bar)

How well does it perform measuring medium pressures with a pressure range between 1 and 100 bar?

Within the medium pressure range (1-100 bar), thin-film strain gauges on metal sensing diaphragms start to truly shine. As pressure increases, the need for large, thin diaphragms diminishes, allowing for greater diaphragm stiffness and improved elasticity. This translates to enhanced output sensitivity, accuracy, and overall performance. In this pressure regime, the technology strikes an optimal balance between sensitivity and robustness, improving on variable-capacitance ceramic sensing technology where cost outweighs performance, and bonded foil strain gauge technology which struggles to provide an adequate output sensitivity particular towards 1 bar.

High Pressure Ranges (100-1000 bar)

How well does it perform measuring high pressures with a pressure range between 100 and 1000 bar?

The inherent robustness of all-welded stainless steel construction, combined with the exceptional accuracy and stability of thin-film strain gauges, establishes this technology as the pinnacle of performance for high-pressure applications ranging from 100 to 1000 bar. The superior mechanical strength of stainless steel diaphragms ensures reliable operation under extreme pressures, while the thin-film strain gauges deliver precise and repeatable measurements even in demanding environments like hydraulic systems and specialized gas handling.

Very High Pressure Ranges (>1000 bar)

How well does it perform measuring very high pressures with a pressure range greater than 1000 bar?

The inherent strength of all-welded stainless-steel construction coupled with the high accuracy of thin-film strain gauges makes this technology a good choice for ultra-high-pressure applications exceeding 1000 bar. However, the niche nature of these extreme pressure ranges limits market demand, and the intricate thin-film strain gauge manufacturing process necessitates large batch sizes to achieve economic viability. Consequently, the availability and cost-effectiveness of such sensors for ultra-high-pressure applications can be constrained.

Absolute Pressure Ranges

Can this sensor technology be easily adapted to measure absolute pressures, or pressures referenced to a hard vacuum?

Adapting thin-film strain gauge technology for absolute pressure measurements presents significant design challenges. It necessitates the incorporation of a stable vacuum reference cavity within the sensor assembly, increasing complexity and manufacturing costs. However, the demand for absolute pressure measurement in high-pressure applications, where thin-film strain gauges excel, is relatively limited. In these scenarios, a precise vacuum reference is often less critical, and the output can be effectively offset by one atmosphere during signal conditioning. This pragmatic approach simplifies the sensor design and leverages the inherent advantages of thin-film strain gauges for high-pressure measurements while acknowledging the complexities associated with absolute pressure referencing.

Accuracy

What level of accuracy performance is achievable from the combined effects of linearity, hysteresis, short term repeatability, temperature errors, and long term stability?

The combination of high-strength metal diaphragms and directly deposited thin-film strain gauges, devoid of adhesives, minimizes any adverse impact on diaphragm elasticity. This configuration facilitates exceptional accuracy, repeatability, and long-term stability in pressure measurements. The inherent stability of the metal diaphragm, coupled with the intimate bond between the strain gauges and the diaphragm surface, minimizes hysteresis and temperature-induced errors. Consequently, thin-film strain gauge technology on metal diaphragms offers a compelling solution for applications demanding high precision and reliability across a wide range of operating conditions.

Output Sensitivity

What is the level and quality of the output produced from the transducer technology, before any signal conditioning electronics is added?

Thin-film strain gauges, typically fabricated from materials like polysilicon or metal alloys, possess inherently high gauge factors. This characteristic translates to a substantial change in electrical resistance for a given applied strain, resulting in a robust and readily detectable output signal even under relatively small pressure variations. This inherent sensitivity, combined with the low noise characteristics of thin-film strain gauges, contributes to a high-quality, unamplified output signal that is well-suited for subsequent signal conditioning and processing.

Frequency Response

How quickly does the sensor’s output respond to changes in pressure?

The dynamic response of thin-film strain gauge technology is generally favorable, owing to its utilization of medium to small-sized metal diaphragms characterized by low mass and inertia. This inherent agility enables rapid deformation in response to pressure fluctuations. Additionally, the direct integration of strain gauges within the diaphragm structure eliminates any potential delays associated with mechanical coupling or transmission, further enhancing response speed.

Compare with other pressure sensor technologies

How do pressure sensors that use a metal diaphragm with thin film strain gauges compare to other technologies?

Sensing technology Si-Chip Si-Isolated Thick-Film Var-Cap Thin-Film BFSG
Sensing diaphragm material Excellent Excellent Fair Fair Good Good
Media compatibility Bad Good Excellent Excellent Good Good
Oil fill leak risk Excellent Bad Excellent Excellent Excellent Excellent
Pressure containment Poor Good Fair Fair Excellent Excellent
Small size Excellent Good Fair Poor Good Fair
Corrosion resistance Bad Good Excellent Excellent Fair Fair
Abrasion resistance Bad Bad Excellent Excellent Fair Fair
High pressure spikes Bad Poor Fair Poor Good Good
Overpressure rating Good Excellent Fair Good Poor Poor
Very low pressure < 100mb Good Poor Bad Good Bad Bad
Low pressure 100…1000mb Good Good Poor Good Bad Bad
Medium pressure 1…100bar Fair Excellent Excellent Fair Good Fair
High pressure 100…1000bar Bad Good Fair Bad Excellent Good
Very high pressure > 1000bar Bad Bad Bad Bad Good Excellent
Absolute pressure ranges Fair Excellent Good Good Bad Bad
Accuracy Excellent Good Poor Fair Good Fair
Output Sensitivity Excellent Excellent Fair Excellent Good Fair
Frequency response Excellent Good Fair Poor Good Fair
Comparison rating (90 max) 56 63 59 61 62 57

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Checklist for thin film pressure sensor requirements

Define your thin film pressure sensor requirements using this checklist:

  1. Pressure range?
  2. Overpressure?
  3. Output signal?
  4. Dynamic response?
  5. Accuracy?
  6. Electrical connection?
  7. Process connection?
  8. Size dimensions?
  9. Process media type?
  10. Media temperature range?
  11. Environment temperature range?
  12. Environment shock and vibration?
  13. Shock pressures?