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Chemical Resistant Pressure Sensor Elements for Electronic Devices & Embedded Product Design & Development

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Pressure sensor elements with sensing diaphragms made from alumina ceramic (Al2O3) for electronic & mechanical oem integration into measurement & control instrumentation designs.

These compact coin sized pressure sensing capsules can be specified to measure ranges from 0…60 mbar or 24 inH20 up to 0…800 bar or 11,600 psi.

The basic ceramic hockey puck versions have no signal amplification and will provide a core transducer signal of either a wheatstone bridge strain gauge ratiometric millivolt output or a capacitance difference signal output.

Contents

  • Product Parameters
  • Product Description
    • Chemically inert
    • One piece ceramic design
    • No permanent seals
    • No compensation PCB
    • Reinforced mounting area
    • Lower profile
    • Regulations Compliance
    • Response Time
  • Product Series Types
    • Piezoresistive Flush Membrane
      • Piezoresistive Flush Membrane without Signal Conditioning
        • ME501 Low Pressure
        • ME505 High Pressure
        • ME506 Small Diameter
        • ME509 Very Low Pressure
        • ME504 Digitally Trimmed Offset
      • Piezoresistive Flush Membrane with Signal Conditioning
        • ME770 bar Range 0.5-4.5Vdc Ratiometric PCB
        • MEP770 psi Range 0.5-4.5Vdc Ratiometric PCB
        • ME771 bar Range 4-20mA Current Loop PCB
        • MEP771 psi Range 4-20mA Current Loop PCB
        • ME772 bar Range 0-10Vdc PCB
        • MEP772 psi Range 0-10Vdc PCB
        • ME780 bar Range 0.5-4.5Vdc Ratiometric Chip on Ceramic
        • MEP780 psi Range 0.5-4.5Vdc Ratiometric Chip on Ceramic
        • ME782 bar Range Digital I²C Chip on Ceramic
        • MEP782 psi Range Digital I²C Chip on Ceramic
    • Piezoresistive Monolithic
      • Piezoresistive Monolithic without Signal Conditioning
        • ME600 High Pressure, Thermal Comp
        • ME651 Low Pressure, Thermal Comp
        • ME657 Small Diameter, Thermal Comp
        • ME662 Low Pressure, No Thermal Comp
        • ME667 Temp Sensor, Low Pressure, No Thermal Comp
        • ME670 Digitally Trimmed Offset
        • ME663 Closer Solder Pads, Low Pressure, Thermal Comp
      • Piezoresistive Monolithic with Signal Conditioning
        • ME750 bar Range 0.5-4.5Vdc Ratiometric PCB
        • MEP750 psi Range 0.5-4.5Vdc Ratiometric PCB
        • ME751 bar Range 4-20mA Current Loop PCB
        • MEP751 psi Range 4-20mA Current Loop PCB
        • ME752 bar Range 0-10Vdc PCB
        • MEP752 psi Range 0-10Vdc PCB
        • ME790 bar Range 0.5-4.5Vdc Ratiometric Chip on Ceramic
        • MEP790 psi Range 0.5-4.5Vdc Ratiometric Chip on Ceramic
    • Capacitive Flush Membrane
      • Capacitive Flush Membrane without Signal Conditioning
        • ME550 Low Pressure High Overpressure
      • Capacitive Flush Membrane with Signal Conditioning
        • ME703 Hz Low Pressure, High Overpressure
  • Product Selection Family Tree
  • Product Accessories
    • Pressure Sensor Cell Mounting Kit
  • Product Applications

Product Parameters

  • Pressure Ranges: 0-60 mbar up 800 bar vented gauge, absolute or sealed gauge
  • Output Signals: mV/V ratiometric, 0-10Vdc, 4-20mA, 0.5-4.5Vdc ratiometric, capacitive (pF), frequency (Hz)
  • Electrical Connections: soldering pads, solder pins, flexible ribbon cable
  • Pressure Connections: flush diaphragm suitable for O ring sealed assembly
  • Media Compatibility: Ceramic alumina Al2O3, compatible with many acids, alkalines & solvents, plus common liquids & gases
  • Special Features: RoHS & REACH compliance, Conflict minerals free

Product Description

Chemically inert

High corrosion protection from acidic or alkaline solutions. These disc shaped pressure sensor elements are made from 96% pure alumina ceramic which unlike many metal based sensors, is chemically inert and therefore unaffected by most corrosive substances.

Alumina Ceramic (Al2O3) has excellent chemical corrosion resistance to many aggressive gases, solvents and acids. No additional protection is normally required to protect the sensor diaphragm from the measurement medium.

One piece ceramic design

The active sensing element, compensation trimming, electrical contacts and mounting components are all incorporated into one homogenous low profile circular design.

No permanent seals

No welding or adhesive bonding is required to mount these pressure sensor capsules. This leads to a low cost assembly without requiring any specialised manufacturing processes.

Permanent seals can introduce performance changes due to the settling of welds & bonds over time, as the pressure transducer is pressure cycled and exposed to temperature variations.

No compensation PCB

Simple construction with either thick film strain gauge or variable capacitance type sensing technology.

Ceramic is a natural electrical insulator so that can also act as a substrate for adding laser trimmed resistors to tighten output tolerances without the need for incorporating a separate PCB assembly which adds size, cost and complexity to the pressure sensors clean hockey puck shaped design.

Reinforced mounting area

The outer area of the ceramic disk is thicker than the active sensing area in the middle, so that it can be used to seal on an elastomer o ring and reduce diaphragm deflections caused by mounting stresses.

The variation in thickness of the monolithic piece of ceramic makes it possible to incorporate a thin pressure sensing area for overlaying the strain gauges and a thick outer section which is sufficiently rigid enough to be used as a sealing surface and diaphragm mount for the thinner sensing area.

Lower profile

The hockey puck shaped style of ceramic pressure sensing capsules is much shorter than other pressure sensing technology which incorporate a silicon strain gauge element into an oil filled glass to metal seal capsule.

These flatter ceramic pressure measurement devices can be used inside instruments with much shallower and narrower space requirements, where button seal type capsules with vertical pin feedthroughs would not fit.

Since the electronic contacts are soldering pads located on the ceramic surface which makes it possible to connect wires parallel to the flat surface without any appreciable increase in assembly height.

Regulations Compliance

These ceramic pressure sensor modules are manufactured to standards to ensure compliance with REACH (Registration, Evaluation, Authorisation & restriction of CHemicals), RoHS (Restriction of Hazardous Substances) and Conflict Mineral Free.

Response Time

This graph shows how the output response time to an applied pressure varies by pressure range for the ME501/505 type series.

me501-505-response-time

Product Series Types

Piezoresistive Flush Membrane

The ceramic piezoresistive pressure sensor capsules are made with a ceramic base plate and a flush diaphragm and work following the piezoresistive principle. The Wheatstone bridge is screen printed on one side of the flush ceramic diaphragm which is, in turn, glued to the sensor’s body. The bridge faces the inside where a cavity is made and the diaphragm’s opposite side can therefore be exposed directly to the medium to be measured.

Piezoresistive Flush Membrane without Signal Conditioning

ME501 Low Pressure

ME501 low pressure flush diaphragm piezoresistive ceramic pressure sensing core element

  • Pressure Ranges: 0.5*, 1, 2, 5, 10, 20, 50 bar
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: mV/V ratiometric
  • Diameter: 18mm
ME505 High Pressure

ME505 high pressure flush diaphragm piezoresistive ceramic pressure measuring element

  • Pressure Ranges: 100, 200, 400, 600, 800 bar
  • Reference Type: Sealed Gauge
  • Output Type: mV/V ratiometric
  • Diameter: 18mm
ME506 Small Diameter

ME506 small 18mm diameter flush diaphragm piezoresistive ceramic pressure sensing capsule

  • Pressure Ranges: 1, 2, 5, 10, 20, 50 bar
  • Reference Type: Gauge, Sealed Gauge, Absolute
  • Output Type: mV/V ratiometric
  • Diameter: 15mm
ME509 Very Low Pressure

ME509 very low pressure flush diaphragm oem mV/V output sensor cell

  • Pressure Ranges: 0.2, 0.5, 1.0 bar
  • Reference Type: Gauge, Absolute (1 bar only)
  • Output Type: mV/V ratiometric
  • Diameter: 32.4mm
ME504 Digitally Trimmed Offset

ME504 oem flush diaphragm pressure sensor module for digital trimming offset

  • Pressure Ranges: 0.5*, 1, 2, 5, 10, 20, 50, 100, 200, 400, 600, 800 bar
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: mV/V ratiometric
  • Diameter: 32.4mm

Piezoresistive Flush Membrane with Signal Conditioning

ME770 bar Range 0.5-4.5Vdc Ratiometric PCB

ME770 bar 0.5 to 4.5Vdc ratiometric output pcb and ceramic flush diaphragm pressure transducer module

  • Pressure Ranges: 0.5*, 1, 1.6, 2, 2.5, 4, 5, 6, 10, 16, 20, 25, 40, 50, 100, 200, 250, 400, 600 bar
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: 0.5 to 4.5Vdc ratiometric
  • Diameter: 18mm
MEP770 psi Range 0.5-4.5Vdc Ratiometric PCB

MEP770 psi range 0.5 to 4.5Vdc ratiometric output pcb and ceramic flush diaphragm pressure transducer module

  • Pressure Ranges: 7.5*, 15, 20, 30, 50, 60, 100, 115, 150, 300, 400, 500, 750, 1000, 1500, 3000, 4000, 5000, 8500 psi
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: 0.5 to 4.5Vdc ratiometric
  • Diameter: 18mm
ME771 bar Range 4-20mA Current Loop PCB

ME771 bar range 4-20mA current loop output pcb and ceramic flush diaphragm pressure transducer module

  • Pressure Ranges: 0.5*, 1, 1.6, 2, 2.5, 4, 5, 6, 10, 16, 20, 25, 40, 50, 100, 200, 250, 400, 600 bar
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: 4 to 20mA current loop
  • Diameter: 18mm
MEP771 psi Range 4-20mA Current Loop PCB

MEP771 psi range 4-20mA current loop output pcb and ceramic flush diaphragm pressure transducer module

  • Pressure Ranges: 7.5*, 15, 20, 30, 50, 60, 100, 115, 150, 300, 400, 500, 750, 1000, 1500, 3000, 4000, 5000, 8500 psi
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: 4 to 20mA current loop
  • Diameter: 18mm
ME772 bar Range 0-10Vdc PCB

ME772 bar range 0-10Vdc output pcb and ceramic flush diaphragm pressure transducer module

  • Pressure Ranges: 0.5*, 1, 1.6, 2, 2.5, 4, 5, 6, 10, 16, 20, 25, 40, 50, 100, 200, 250, 400, 600 bar
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: 0 to 10 volt dc
  • Diameter: 18mm
MEP772 psi Range 0-10Vdc PCB

MEP772 psi range 0-10Vdc output pcb and ceramic flush diaphragm pressure transducer module

  • Pressure Ranges: 7.5*, 15, 20, 30, 50, 60, 100, 115, 150, 300, 400, 500, 750, 1000, 1500, 3000, 4000, 5000, 8500 psi
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: 0 to 10 volt dc
  • Diameter: 18mm
ME780 bar Range 0.5-4.5Vdc Ratiometric Chip on Ceramic

ME780 bar range 0.5-4.5Vdc ratiometric output chip on ceramic flush diaphragm pressure transducer module

  • Pressure Ranges: 0.5*, 1, 2, 5, 10, 16, 20, 50, 100, 200, 250, 400, 600 bar
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: 0.5 to 4.5Vdc ratiometric
  • Diameter: 18mm
MEP780 psi Range 0.5-4.5Vdc Ratiometric Chip on Ceramic

MEP780 psi range 0.5-4.5Vdc ratiometric output chip on ceramic flush diaphragm pressure transducer module

  • Pressure Ranges: 7.5*, 15, 30, 100, 150, 300, 400, 1000, 1500, 3000, 4000, 5000, 8500 psi
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: 0.5 to 4.5Vdc ratiometric
  • Diameter: 18mm
ME782 bar Range Digital I²C Chip on Ceramic

ME782 bar range digital I2C output chip on ceramic flush diaphragm pressure transducer module

  • Pressure Ranges: 0.5*, 1, 2, 5, 10, 16, 20, 50, 100, 200, 250, 400, 600 bar
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: Digital I²C
  • Diameter: 18mm
MEP782 psi Range Digital I²C Chip on Ceramic

MEP780 psi range digital I2C output chip on ceramic flush diaphragm pressure transducer module

  • Pressure Ranges: 7.5*, 15, 30, 100, 150, 300, 400, 1000, 1500, 3000, 4000, 5000, 8500 psi
  • Reference Type: Gauge (*), Sealed Gauge, Absolute
  • Output Type: Digital I²C
  • Diameter: 18mm

Piezoresistive Monolithic

Monolithic pressure sensors are made with a ceramic cell and work following the piezoresistive principle. The Wheatstone bridge is screen printed directly on one side of the ceramic diaphragm by means of Thick Film technology. Due to the reinforced outer area (monolithic structure), the sensor can be mounted directly in a plastic or metallic case by using O-ring.

Piezoresistive Monolithic without Signal Conditioning

ME600 High Pressure, Thermal Comp

ME600 high pressure thermally compensated monolithic piezoresistive ceramic pressure sensing core element

  • Pressure Ranges: 100, 200, 250, 400 bar
  • Reference Type: Gauge
  • Output Type: mV/V ratiometric
  • Diameter: 18mm
ME651 Low Pressure, Thermal Comp

ME651 low pressure thermally compensated monolithic piezoresistive ceramic pressure transducer cell

  • Pressure Ranges: 2, 5, 10, 20, 50 bar
  • Reference Type: Gauge
  • Output Type: mV/V ratiometric
  • Diameter: 18mm
ME657 Small Diameter, Thermal Comp

ME657 small diameter thermally compensated monolithic piezoresistive ceramic pressure sensor core module

  • Pressure Ranges: 350 bar
  • Reference Type: Gauge
  • Output Type: mV/V ratiometric
  • Diameter: 12.85mm
ME662 Low Pressure, No Thermal Comp

ME662 low pressure thermally uncompensated monolithic piezoresistive ceramic pressure sensing bare cell

  • Pressure Ranges: 2, 5, 10, 20, 50 bar
  • Reference Type: Gauge
  • Output Type: mV/V
  • Diameter: 18mm
ME667 Temp Sensor, Low Pressure, No Thermal Comp

ME667 low pressure thermally uncompensated monolithic piezoresistive ceramic pressure sensing bare cell with temperature sensor

  • Pressure Ranges: 2, 5, 10, 20, 50 bar
  • Reference Type: Gauge
  • Output Type: mV/V ratiometric
  • Diameter: 18mm
ME670 Digitally Trimmed Offset

ME670 thermally compensated monolithic piezoresistive ceramic pressure transducer button cell for digital trimming offset

  • Pressure Ranges: 2, 5, 10, 20, 50, 100, 200, 250, 400 bar
  • Reference Type: Gauge
  • Output Type: mV/V ratiometric
  • Diameter: 18mm
ME663 Closer Solder Pads, Low Pressure, Thermal Comp

ME663 low pressure thermally compensated monolithic piezoresistive ceramic pressure sensor diaphragm with closer solder pads

  • Pressure Ranges: 2, 5, 10, 20, 50 bar
  • Reference Type: Gauge
  • Output Type: mV/V ratiometric
  • Diameter: 18mm

Piezoresistive Monolithic with Signal Conditioning

ME750 bar Range 0.5-4.5Vdc Ratiometric PCB

ME750 bar 0.5 to 4.5Vdc ratiometric output pcb monolithic ceramic pressure transducer module

  • Pressure Ranges: 1.6, 2, 2.5, 4, 5, 6, 10, 16, 20, 25, 40, 50, 100, 200, 250, 400 bar
  • Reference Type: Gauge
  • Output Type: 0.5 to 4.5Vdc ratiometric
  • Diameter: 18mm
MEP750 psi Range 0.5-4.5Vdc Ratiometric PCB

MEP750 psi 0.5 to 4.5Vdc ratiometric output pcb monolithic ceramic pressure transducer module

  • Pressure Ranges: 20, 30, 50, 60, 100, 115, 150, 300, 400, 500, 750, 1000, 1500, 3000, 4000, 5000 psi
  • Reference Type: Gauge
  • Output Type: 0.5 to 4.5Vdc ratiometric
  • Diameter: 18mm
ME751 bar Range 4-20mA Current Loop PCB
ME751 bar 4 to 20 milliamp output pcb monolithic ceramic pressure sensor cell
  • Pressure Ranges: 1.6, 2, 2.5, 4, 5, 6, 10, 16, 20, 25, 40, 50, 100, 200, 250, 400 bar
  • Reference Type: Gauge
  • Output Type: 4 to 20mA current loop
  • Diameter: 18mm
MEP751 psi Range 4-20mA Current Loop PCB

MEP751 psi 4 to 20 milliamp output pcb monolithic ceramic pressure sensor cell

  • Pressure Ranges: 20, 30, 50, 60, 100, 115, 150, 300, 400, 500, 750, 1000, 1500, 3000, 4000, 5000 psi
  • Reference Type: Gauge
  • Output Type: 4 to 20mA current loop
  • Diameter: 18mm
ME752 bar Range 0-10Vdc PCB

ME752 bar 0 to 10 volts dc output pcb monolithic ceramic pressure sensing module

  • Pressure Ranges: 1.6, 2, 2.5, 4, 5, 6, 10, 16, 20, 25, 40, 50, 100, 200, 250, 400 bar
  • Reference Type: Gauge
  • Output Type: 0 to 10 volts dc
  • Diameter: 18mm
MEP752 psi Range 0-10Vdc PCB

MEP752 psi 0 to 10 volts dc output pcb monolithic ceramic pressure sensing module

  • Pressure Ranges: 20, 30, 50, 60, 100, 115, 150, 300, 400, 500, 750, 1000, 1500, 3000, 4000, 5000 psi
  • Reference Type: Gauge
  • Output Type: 0 to 10 volts dc
  • Diameter: 18mm
ME790 bar Range 0.5-4.5Vdc Ratiometric Chip on Ceramic

ME790 bar range 0.5-4.5Vdc ratiometric output chip on monolithic ceramic pressure transducer module

  • Pressure Ranges: 2.5, 4, 5, 6, 10, 16, 20, 25, 40, 50, 100, 200, 250, 400 bar
  • Reference Type: Gauge
  • Output Type: 0.5 to 4.5Vdc ratiometric
  • Diameter: 18mm
MEP790 psi Range 0.5-4.5Vdc Ratiometric Chip on Ceramic

MEP790 psi range 0.5-4.5Vdc ratiometric output chip on monolithic ceramic pressure transducer module

  • Pressure Ranges: 50, 60, 100, 115, 150, 300, 400, 500, 750, 1000, 1500, 3000, 4000, 5000 psi
  • Reference Type: Gauge
  • Output Type: 0.5 to 4.5Vdc ratiometric
  • Diameter: 18mm

Capacitive Flush Membrane

Variable capacitance pressure sensors are made with a ceramic base plate and a flush diaphragm and work following the capacitive principle, in which the pressure measurement is given by the variation of capacitance due to deformation of a capacitor’s plates. The moving capacitor plate is screen printed on the flush ceramic diaphragm which is, in turn, glued to the sensor’s body. The capacitor plate faces the inside where a cavity is made and the diaphragm’s opposite side can therefore be exposed directly to the medium to be measured. Sensor’s vent hole is protected against humidity and dirt by a special filter glued to the ceramic cell (PCS). The wide diameter (32.4 mm) and the use of the capacitive technology make the ME550 a sensor suitable for measuring very low pressures, as low as 60 mbar. Nevertheless, these low range pressure sensors feature a high burst pressure, making them quite reliable in many applications.

Capacitive Flush Membrane without Signal Conditioning

ME550 Low Pressure High Overpressure

ME550 low pressure high overpressure capacitive ceramic flush diaphragm pressure measuring cell

  • Pressure Ranges: 0.06*, 0.16*, 0.4*, 1, 2, 5, 10, 20 bar
  • Reference Type: Gauge (*), Absolute
  • Output Type: Δ Capacitance Ratio
  • Diameter: 32.4mm

Capacitive Flush Membrane with Signal Conditioning

ME703 Hz Low Pressure, High Overpressure

ME550 frequency output low pressure high overpressure capacitive ceramic flush diaphragm pressure transducer assembly

  • Pressure Ranges: 0.06*, 0.16*, 0.4*, 1, 2, 5, 10, 20 bar
  • Reference Type: Gauge (*), Absolute
  • Output Type: Frequency (Hz)
  • Diameter: 32.4mm

Product Selection Family Tree

Metallux Pressure Sensors Selection Family Tree Diagram

Product Accessories

Pressure Sensor Cell Mounting Kit

kit0400-solid-modelThe pressure sensor cell mounting kit his intended to reduce initial cost and development time for mounting a ceramic pressure transducer diaphragm module into a sensor housing, in order to help the design engineer quickly test the features of the pressure sensor cell or signal conditioned pressure sensor modules. The KIT0400 includes a steel housing (two parts) plus 5 kantseal FKM DKAR 00014 V9004 O rings, for repetitive assembly operations. During the assembly of the ceramic cell in its housing, it is very important to observe the correct closing torque to prevent any unnecessary mechanical stress on the ceramic element.

Product Applications

  • Agricultural machinery & farm equipment
  • Air compressors
  • Brewery control & bottling equipment
  • CO2 filling & carbonated drink bottling production
  • Cranes & hydraulic lifting equipment
  • Diesel engine distributor injection pumps
  • Diesel engine inlet manifold pressure
  • Diving equipment & breathing apparatus
  • Earth movers & diggers
  • Engine oil pressure
  • Exhaust systems
  • Food & drink processing
  • Geophysical measurement pressure control
  • Hydraulic valves & actuators
  • Hydronics underfloor water heating systems
  • Hydrostatic liquid level measurement instrumentation
  • Industrial robot pneumatic & hydraulic systems
  • Ink-Jet printers and labelling machine
  • Laboratory & analytical instrumentation
  • Marine engine monitoring & controls
  • Medical equipment & instrumentation
  • Oceanographic research instrumentation
  • ROV control systems
  • Painting robots
  • Pressure sensors, indicators and gauges
  • Pumps
  • Refrigeration compressors
  • Semiconductor
  • Tank contents management system
  • Vehicle power steering systems

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